The Lam Research AX-2000 is an industrial-grade RF Plasma Generator, originally known as the ADTEC AX-2000 III.
This device operates at 13.56MHz and is part of a series that includes the AX-30000W, AX-7500W, and AX-3000 models. It is designed for precise control and is compatible with the AMU-2000MET Matching Unit. This generator is used in semiconductor manufacturing processes, ensuring high-quality plasma generation for etching and deposition applications. Its robust design makes it suitable for various industrial settings where reliable plasma generation is essential.