The ADTEC AX-2000III plasma generator, manufactured by Lam Research, is a high-frequency RF plasma generator operating at 13.56 MHz. This model is known for its robust performance and is commonly used in industrial applications requiring precise plasma generation.
The AX-2000III is part of a series that includes AX-30000W and AX-7500W, indicating a range of power capabilities. It features a power control board, specifically the SD2931-11, which is essential for its operation. The generator is often sold as a used unit with fast shipping and a 120-day warranty, ensuring reliability and ease of integration into existing systems. This product is suitable for various industrial processes, including etching and deposition in semiconductor manufacturing.